Combustion-type exhaust gas treatment device GUARDIAN
Pioneer of combustion type
● Compatible with various exhaust gases from CVD and Dry Etcher. ● G-type and F-type are available according to the gas recipe.
- Company：小池酸素工業
- Price：Other
Combustion exhaust gas treatment equipment Product List and Ranking from 4 Manufacturers, Suppliers and Companies
Last Updated： Aggregation Period:Jul 16, 2025～Aug 12, 2025
This ranking is based on the number of page views on our site.
Combustion exhaust gas treatment equipment Manufacturer, Suppliers and Company Rankings
Last Updated： Aggregation Period:Jul 16, 2025～Aug 12, 2025
This ranking is based on the number of page views on our site.
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- エア・ガシズ・テクノス Tokyo//Industrial Machinery
- 小池酸素工業 Chiba//Industrial Machinery
- 4 エア・ウォーター・メカトロニクス Kanagawa//Electronic Components and Semiconductors
- 5 田端機械工業 Tokyo//Industrial Machinery
Combustion exhaust gas treatment equipment Product ranking
Last Updated： Aggregation Period:Jul 16, 2025～Aug 12, 2025
This ranking is based on the number of page views on our site.
- Significant reduction of CO2 emissions! Heat recovery rate of 95% for thermal storage combustion exhaust gas treatment system.
- Catalytic combustion exhaust gas treatment device "ZR Series" エア・ガシズ・テクノス
- Combustion-type exhaust gas treatment device GUARDIAN 小池酸素工業
- Heat storage combustion-type exhaust gas treatment device
- 4 More efficient than direct combustion! Heat recovery rate of 95% for thermal storage combustion exhaust gas treatment system.
Combustion exhaust gas treatment equipment Product List
1～9 item / All 9 items
Displayed results
Combustion-type exhaust gas treatment device
It is a combustion-type exhaust gas treatment device.
This device processes exhaust gases such as hydrogen compounds like SiH4, and fluorinated compounds like C2F6 and SF6, which are emitted by semiconductor manufacturing equipment, by utilizing the thermal exhaust from a combustion burner for thermal decomposition. Additionally, the products generated after thermal decomposition (such as SiO2 powder and acidic gases) are further processed in a wet scrubber within the same package. 【Features】 - By separating the combustion nozzle and the secondary combustion chamber, stable combustion is possible during flow rate fluctuations. - It can handle exhaust gases with a maximum processing flow rate of 500 L/min (capable of supporting up to 4 ports). - Wall air prevents the adhesion of by-products inside the combustion chamber. - The adoption of a direct cooling method using water spray immediately after the combustion tube has achieved space-saving design. - Continuous stirring of the circulating water in the wet scrubber tank prevents circulation pump troubles caused by SiO2 powder slurry. - Equipped with various sensors, ensuring comprehensive safety measures. - The touch panel allows for easy operation and monitoring of the operating status. *For more details, please refer to the PDF materials or feel free to contact us.*
- Company：エア・ウォーター・メカトロニクス
- Price：Other
Catalytic combustion type exhaust gas treatment device DEOCAT
Efficiently detoxifying volatile organic gases using the "catalytic combustion method."
DEOCAT deodorizes and detoxifies VOCs (volatile organic compounds) generated from extruder die sections using an oxidation catalyst for low-temperature combustion (approximately 350°C). Hydrocarbon reaction formula: CmHn + O2 = CO2 + H2O + reaction heat.
- Company：田端機械工業
- Price：Other
Catalytic combustion exhaust gas treatment device "ZR Series"
Catalytic combustion type exhaust gas treatment device with improved fuel efficiency and deodorization effect.
The "ZR Series" is a catalytic combustion exhaust gas treatment device that removes unpleasant odors and harmful substances generated in fields such as printing, painting, chemicals, resin processing, and the food industry through catalytic oxidation. Using high-performance platinum-based catalysts, it decomposes and deodorizes organic odor components and harmful substances into water vapor and carbon dioxide at low temperatures of 250°C to 350°C. There is no generation of NOx (nitrogen oxides) associated with wastewater or catalytic oxidation, and it does not pollute the atmosphere. *For more details, please download the PDF or feel free to contact us.
- Company：エア・ガシズ・テクノス
- Price：Other
Direct Combustion Type Exhaust Gas Treatment Device "DZR Series"
Direct combustion type "DZR series" that does not select processing gas components.
The organic odor components contained in exhaust gas are directly burned in a high-efficiency combustion furnace at temperatures between 600°C and 800°C for deodorization treatment. A wide range of odor substances, such as ammonia and hydrogen sulfide, can be processed. By ensuring efficient mixing of exhaust gas and sufficient residence time within the combustion furnace maintained at 600°C to 800°C, excellent exhaust gas treatment effects are achieved. Organic solvent components are decomposed and deodorized into water vapor and carbon dioxide, preventing secondary pollution. The exhaust heat after treatment can be recovered through a heat exchanger and utilized as a heat source for the process, as well as for heating and cooling.
- Company：エア・ガシズ・テクノス
- Price：Other
